INDUSTRY COMPONENT

Sense Electrodes/Combs

Capacitive sensing elements in MEMS gyroscopes that detect angular velocity through comb finger displacement.

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Component Specifications

Definition
Sense electrodes, also known as comb drives or interdigitated fingers, are microelectromechanical system (MEMS) structures in 3-axis gyroscopes. They form variable capacitors that detect Coriolis-induced motion between stationary (stator) and movable (rotor) comb fingers. As the gyroscope rotates, the Coriolis force displaces the proof mass, changing the capacitance between comb fingers, which is converted into electrical signals proportional to angular velocity.
Working Principle
Operates on capacitive sensing principle. Stationary comb fingers are fixed to the substrate, while movable fingers are attached to a proof mass suspended by springs. During rotation, Coriolis acceleration causes proof mass oscillation perpendicular to drive direction, changing overlap area or gap between comb fingers, thus modulating capacitance. This capacitance change is measured by integrated circuitry to calculate angular velocity.
Materials
Single-crystal silicon (SCS) or polysilicon with silicon dioxide insulation; gold or aluminum metallization for electrical contacts; silicon nitride for stress compensation layers.
Technical Parameters
  • Finger Gap 1-3 μm
  • Sensitivity 1-10 mV/°/s
  • Finger Width 1-5 μm
  • Overlap Area 1000-5000 μm²
  • Finger Length 50-200 μm
  • Capacitance Range 10-100 fF
  • Quality Factor (Q) 100-1000
  • Resonant Frequency 10-30 kHz
Standards
ISO/IEC 62047, DIN EN 62047

Industry Taxonomies & Aliases

Commonly used trade names and technical identifiers for Sense Electrodes/Combs.

MEMS sense electrodes capacitive comb drives gyroscope sensing elements interdigitated fingers angular velocity sensors MEMS gyroscope components Sense Electrodes/Combs Sense Electrodes/Combs in Computer, Electronic and Optical Product Manufacturing

Parent Products

This component is used in the following industrial products

3-Axis Gyroscope

A sensor that measures angular velocity around three orthogonal axes (X, Y, Z).

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Engineering Analysis

Risks & Mitigation
  • Stiction causing permanent adhesion
  • Capacitance drift due to temperature variations
  • Mechanical fatigue in comb fingers
  • Contamination affecting capacitance measurements
  • Electrostatic discharge damage
FMEA Triads
Trigger: Humidity or contamination between comb fingers
Failure: Stiction - fingers adhere permanently
Mitigation: Apply hydrophobic coatings, maintain cleanroom assembly, implement anti-stiction bumps
Trigger: Thermal expansion mismatch
Failure: Capacitance drift and sensitivity variation
Mitigation: Use temperature compensation algorithms, select materials with matched CTE, implement thermal isolation structures

Industrial Ecosystem

Compatible With

Interchangeable Parts

Compliance & Inspection

Tolerance
±0.5 μm finger width/gap, ±1° finger alignment
Test Method
Laser Doppler vibrometry for displacement measurement, capacitance-voltage (C-V) characterization, angular rate testing on rate tables

Procurement Evaluation Criteria

Not customer reviews or live demand data. These dimensions support RFQ preparation and supplier evaluation.

Technical documentation
4/5
Manufacturing capability
4/5
Inspection readiness
5/5
Supplier transparency
3/5

These scores are example evaluation dimensions, not real customer ratings, country-specific buyer feedback, or live inquiry activity.

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Frequently Asked Questions

What is the difference between sense electrodes and drive electrodes in MEMS gyroscopes?

Drive electrodes create controlled oscillation of the proof mass, while sense electrodes detect Coriolis-induced displacement. Both use comb structures but serve different functions in the gyroscope operation.

Why are sense electrodes typically made of silicon?

Silicon provides excellent mechanical properties (high Young's modulus, low internal friction), compatibility with IC fabrication processes, and good electrical conductivity when doped, making it ideal for MEMS structures.

Can I contact factories directly?

Yes, each factory profile provides direct contact information.

Data Basis

CNFX manufacturer profiles, technical classification, publicly available product information, and ongoing plausibility checks.

Preliminary Technical Classification
This page supports structured research, RFQ preparation, and supplier evaluation. It does not replace buyer-led supplier qualification, standards review, or technical approval.

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Sense Electrodes Sensing Coil