Drive electrodes are precision components in MEMS gyroscopes that generate controlled electrostatic forces to induce and sustain mechanical oscillation of the proof mass.
Commonly used trade names and technical identifiers for Drive Electrodes.
This component is used in the following industrial products
A device that measures or maintains orientation and angular velocity.
A sensor that measures angular velocity around three orthogonal axes (X, Y, Z).
A sensor that detects and measures angular velocity or orientation changes.
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Drive electrodes initiate and maintain the controlled oscillation of the proof mass, creating the reference vibration needed to detect rotation via the Coriolis effect.
They are typically manufactured using MEMS microfabrication processes like deep reactive ion etching (DRIE) on silicon wafers, forming precise comb or plate structures with sub-micron gaps.
Failure can cause loss of oscillation, reduced amplitude, or frequency drift, leading to gyroscope output errors, bias instability, or complete sensor failure.
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